Nonlinear Dynamics Analysis of a Parametrically Resonant MEMS Sensor
نویسندگان
چکیده
1. ABSTRACT Novel mass sensors based on parametric resonance can achieve high sensitivity because of the sharp transition from zero to large response. Unlike harmonic resonance based mass sensors, the sensitivity of this novel class of sensors will not be affected by damping. However, the presence of nonlinearity in the spring and electrostatic force of the oscillator significantly change the behavior of parametric resonance. In this paper, a nonlinear Mathieu equation is used to examine the effects of nonlinearity. A two-variable method is utilized to analyze this equation. The effects are validated by experiments.
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